Professor Roya Maboudian

Biography

Roya Maboudian is a professor of chemical engineering, associated director of the Center of Integrated Nanomechanical Systems (COINS), and faculty affiliate of the Berkeley Sensor & Actuator Center (BSAC) at the University of California, Berkeley. She received her B.S. degree in Electrical Engineering from the Catholic University of America, Washington, DC; and her M.S. and Ph.D. degrees in Applied Physics from the California Institute of Technology. Prof. Maboudian's research expertise is in the materials and surface engineering of micro/nanosystems. She and her group have examined the tribological issues in micro/nanoelectromechanical systems and designed surface processes to reduce adhesion (stiction) and friction in M/NEMS. In addition, they have developed novel schemes to integrate silicon carbide and diamond-like carbon films into MEMS technology for extreme environments. More recently, they have been exploring methods to selectively grow a variety of nano-structures and integrating them with other micro/nanocomponents for sensing and energy applications. Prof. Maboudian has authored and co-authored over 130 peer-reviewed scientific papers (including 16 invited review articles) and 4 patents. The publications are related to various aspects of M/NEMS science and technology, silicon carbide technology for harsh environment, micromechanics and tribology, surface science and engineering, surface functionalization, thin film and nanostructure growth, oxidation, etching and transport properties. She is the recipient of several awards, including the Presidential Early Career Award for Scientists and Engineers (PECASE) from the White House, NSF Young Investigator award, and the Beckman Young Investigator award.